- All sections
- G - Physics
- G01L - Measuring force, stress, torque, work, mechanical power, mechanical efficiency, or fluid pressure
- G01L 21/30 - Vacuum gauges by making use of ionisation effects
Patent holdings for IPC class G01L 21/30
Total number of patents in this class: 148
10-year publication summary
|
10
|
12
|
9
|
4
|
3
|
2
|
1
|
2
|
1
|
3
|
| 2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| MKS Instruments, Inc. | 698 |
18 |
| Tokyo Electron Limited | 11599 |
16 |
| Lam Research Corporation | 4775 |
13 |
| Applied Materials, Inc. | 16587 |
11 |
| Canon Anelva Corporation | 676 |
5 |
| Hitachi High-Tech Corporation | 4424 |
5 |
| Hon Hai Precision Industry Co., Ltd. | 4157 |
4 |
| Tsinghua University | 5426 |
4 |
| Samsung Electronics Co., Ltd. | 131630 |
3 |
| Brooks Automation, Inc. | 191 |
3 |
| Edwards Limited | 764 |
3 |
| Sony Corporation | 32931 |
2 |
| Micron Technology, Inc. | 24960 |
2 |
| Texas Instruments Incorporated | 19376 |
2 |
| Renesas Electronics Corporation | 6305 |
2 |
| INFICON AG | 20 |
2 |
| INFICON GmbH | 59 |
2 |
| INFICON GmbH | 209 |
2 |
| INFICON Holding AG | 164 |
2 |
| Tel Manufacturing and Engineering of America, Inc. | 150 |
2 |
| Other owners | 45 |